The magnesium(II) hydrotris(1-pyrazolyl) borate, Mg[BH(pz)(3)](2), complex has been, for the first time, tested as a precursor for the metal organic chemical vapor deposition (MOCVD) of borate phase thin films. The thermal analyses of this source reveal high volatility and good thermal stability with a low residue left despite its relatively high melting point. In particular, the compound has been successfully applied to the MOCVD fabrication of Mg2B2O5 films, and therefore it represents a suited and reliable single source precursor of borate phases. Mg[BH(pz)(3)](2) provides constant evaporation rates even for very long deposition times and, hence, highly homogeneous films of carefully controlled thickness. (c) 2006 Elsevier B.V. All rights reserved.
Magnesium hydrotris(1-pyrazolyl)borate as a promising single source MOCVD precursor of magnesium borate phases
MALANDRINO, Graziella;
2007-01-01
Abstract
The magnesium(II) hydrotris(1-pyrazolyl) borate, Mg[BH(pz)(3)](2), complex has been, for the first time, tested as a precursor for the metal organic chemical vapor deposition (MOCVD) of borate phase thin films. The thermal analyses of this source reveal high volatility and good thermal stability with a low residue left despite its relatively high melting point. In particular, the compound has been successfully applied to the MOCVD fabrication of Mg2B2O5 films, and therefore it represents a suited and reliable single source precursor of borate phases. Mg[BH(pz)(3)](2) provides constant evaporation rates even for very long deposition times and, hence, highly homogeneous films of carefully controlled thickness. (c) 2006 Elsevier B.V. All rights reserved.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
