We report the synthesis of novel heterobimetallic precursors of the formula [RE(hfa) 4 ] - [Na·tetraglyme] + [RE = Y, Gd; Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme = 2,5,8,11,14-pentaoxapentadecane], which can be efficiently used as a single source for the metal-organic chemical vapor deposition of NaREF 4 films.
Heterobimetallic Sodium Rare-Earth Complexes: "third-Generation" MOCVD Precursors for the Deposition of NaREF 4 (RE = Y, Gd) Films
Battiato, SergioInvestigation
;Malandrino, Graziella
Supervision
2018-01-01
Abstract
We report the synthesis of novel heterobimetallic precursors of the formula [RE(hfa) 4 ] - [Na·tetraglyme] + [RE = Y, Gd; Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme = 2,5,8,11,14-pentaoxapentadecane], which can be efficiently used as a single source for the metal-organic chemical vapor deposition of NaREF 4 films.File in questo prodotto:
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