Summary This chapter contains sections titled: Introduction Thin and Thick Layers: A Tentative Definition What Specific Information MS Techniques could Bring to thin and thick Films Analysis Compared to other Techniques? Main MS Techniques Applied to Thin/Thick Films Time of Sputtering/Speed of Acquisition Trade-Off Differences in Sputtering/Ionization Mechanisms between SIMS and GD-MS Pulse Shapes and how to Best Use Temporal Information for Pulsed Glow Discharge Mass Spectrometry Measurement and Data Interpretation in GD-TOFMS Practical Examples Conclusions List of Abbreviations References
Analysis of thin and thick films
Licciardello, A.;Tuccitto, N.;
2012-01-01
Abstract
Summary This chapter contains sections titled: Introduction Thin and Thick Layers: A Tentative Definition What Specific Information MS Techniques could Bring to thin and thick Films Analysis Compared to other Techniques? Main MS Techniques Applied to Thin/Thick Films Time of Sputtering/Speed of Acquisition Trade-Off Differences in Sputtering/Ionization Mechanisms between SIMS and GD-MS Pulse Shapes and how to Best Use Temporal Information for Pulsed Glow Discharge Mass Spectrometry Measurement and Data Interpretation in GD-TOFMS Practical Examples Conclusions List of Abbreviations ReferencesFile in questo prodotto:
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