In this paper, we investigate a microsensor based on graphene oxide/polyvinyl alcohol for humidity measurements. The working principle is based on a single sensing element, able to measure relative humidity (RH) through the adoption of two readout methods. In particular, we adopt a graphene oxide (GO)/ (polyvinyl alcohol) PVA composite as a functional material and deposited on the top of a microsensor acting as integrated mechanical oscillator realized by using a Silicon on Insulator (SoI) substrate. In the presence of an increment of RH this material is able to increase its inertial mass and, simultaneously, it is able to increase its conductivity. We investigated the thermal dependency of the dual sensor by temperature change under different humidity conditions. A linear relation is obtained and a slope of about 0.033 MΩ/°C and of -0.23 Hz/°C is estimated for both the domains of analysis.
Thermal Analysis of a Microsensor based on GO/Polyvinyl Alcohol for Humidity Measurements
Trigona C.;Baglio S.;
2019-01-01
Abstract
In this paper, we investigate a microsensor based on graphene oxide/polyvinyl alcohol for humidity measurements. The working principle is based on a single sensing element, able to measure relative humidity (RH) through the adoption of two readout methods. In particular, we adopt a graphene oxide (GO)/ (polyvinyl alcohol) PVA composite as a functional material and deposited on the top of a microsensor acting as integrated mechanical oscillator realized by using a Silicon on Insulator (SoI) substrate. In the presence of an increment of RH this material is able to increase its inertial mass and, simultaneously, it is able to increase its conductivity. We investigated the thermal dependency of the dual sensor by temperature change under different humidity conditions. A linear relation is obtained and a slope of about 0.033 MΩ/°C and of -0.23 Hz/°C is estimated for both the domains of analysis.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
