Performance Analysis of an AlN Humidity Sensor based on TiO2 nanoparticles

This paper shows the feasibility of a novel humidity sensor based on a low frequency micromachined electromechanical resonator functionalized with nanoparticles of TiO2. Immunity to the non-idealities of the conditioning electronic components was obtained by means of a low frequency resonator. In addition, this method was also applied in order to minimize the degradation of the resonator quality due to the deposition of the sensing material. The experimental results obtained using an ad-hoc characterization system show that this solution is viable and that the sensor has satisfactory performance in a large humidity range. It is worth noting that the proposed system can be used for structural health monitoring and novel measurements architecture.