The characteristics of a new multidetector based on the use of Monolithic Silicon Telescopes are presented. Using suitable ion implantation techniques, the DeltaE and residual energy stages of the telescopes have been integrated on a single Si chip, obtaining a typical thickness for the DeltaE stage of the order of 2mum.

A modular and compact multidetector system based on monolithic telescopes

MUSUMARRA, Agatino;Rizzo F;TUDISCO, SALVATORE;
2004-01-01

Abstract

The characteristics of a new multidetector based on the use of Monolithic Silicon Telescopes are presented. Using suitable ion implantation techniques, the DeltaE and residual energy stages of the telescopes have been integrated on a single Si chip, obtaining a typical thickness for the DeltaE stage of the order of 2mum.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.11769/55092
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