A series of monolithic active pixel sensor prototypes (APTS chips) were manufac-tured in the TPSCo 65 nm CMOS imaging process in the framework of the CERN-EP R & D on monolithic sensors and the ALICE ITS3 upgrade project. Each APTS chip contains a 4 x 4 pixel matrix with fast analog outputs buffered to individual pads. To explore the process and sensor characteristics, various pixel pitches (10 mu m-25 mu m), geometries and reverse biasing schemes were included. Prototypes are fully functional with detailed sensor characterization ongoing. The design will be presented with some experimental results also correlating to some transistor measurements.

Design of an analog monolithic pixel sensor prototype in TPSCo 65 nm CMOS imaging technology

La Rocca, P;
2023-01-01

Abstract

A series of monolithic active pixel sensor prototypes (APTS chips) were manufac-tured in the TPSCo 65 nm CMOS imaging process in the framework of the CERN-EP R & D on monolithic sensors and the ALICE ITS3 upgrade project. Each APTS chip contains a 4 x 4 pixel matrix with fast analog outputs buffered to individual pads. To explore the process and sensor characteristics, various pixel pitches (10 mu m-25 mu m), geometries and reverse biasing schemes were included. Prototypes are fully functional with detailed sensor characterization ongoing. The design will be presented with some experimental results also correlating to some transistor measurements.
2023
Analogue electronic circuits
Particle tracking detectors (Solid-state detectors)
Solid state detectors
File in questo prodotto:
File Dimensione Formato  
Deng_2023_J._Inst._18_C01065.pdf

solo gestori archivio

Tipologia: Versione Editoriale (PDF)
Licenza: NON PUBBLICO - Accesso privato/ristretto
Dimensione 907.68 kB
Formato Adobe PDF
907.68 kB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.11769/558629
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 3
  • ???jsp.display-item.citation.isi??? 3
social impact