INTEGRATED DEVICE OF THE TYPE COMPRISING AT LEAST A MICROFLUIDIC SYSTEM AND FURTHER CIRCUITRY AND CORRESPONDING INTEGRATION PROCESS

Caligiore, C; Leonardi, S; Baglio, Salvatore; Ando', Bruno

An embodiment relates to a device integrated on a semiconductor substrate of a type comprising at least one first portion for the integration of at least one microfluidic system, and a second portion for the integration of an additional circuitry. The microfluidic system comprises at least one cavity realized in a containment layer of the integrated device closed on top by at least one portion of a polysilicon layer, this polysilicon layer being a thin layer shared by the additional circuitry and the closing portion of the cavity realizing a piezoresistive membrane for the microfluidic system.

Titolo:	INTEGRATED DEVICE OF THE TYPE COMPRISING AT LEAST A MICROFLUIDIC SYSTEM AND FURTHER CIRCUITRY AND CORRESPONDING INTEGRATION PROCESS
Autori interni:	Caligiore C Leonardi S BAGLIO, Salvatore ANDO', Bruno mostra contributor esterni nascondi contributor esterni
Data di pubblicazione:	2011
Handle:	http://hdl.handle.net/20.500.11769/115107
Appare nelle tipologie:	6.1 Brevetto

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Utilizza questo identificativo per citare o creare un link a questo documento:
http://hdl.handle.net/20.500.11769/115107

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