In this paper the problem of controlling the temperature on an RTP system is addressed. The key points of the contribution are the following: a neural model of the considered system is obtained. Based on this model an optimal controller is derived. The goodness of the control system behaviour are shown also in comparison with those reported in literature.
Control of the temperature on rapid thermal processing by AI based techniques
Muscato G.;Nunnari G.;
1997-01-01
Abstract
In this paper the problem of controlling the temperature on an RTP system is addressed. The key points of the contribution are the following: a neural model of the considered system is obtained. Based on this model an optimal controller is derived. The goodness of the control system behaviour are shown also in comparison with those reported in literature.File in questo prodotto:
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