Zinc oxide (ZnO) and ZnO:Al-doped films were deposited by metal organic chemical vapour deposition (MOCVD) using the Zn(tta)(2)center dot tmeda (H-tta = 2-thenoyltrifluoroacetone, tmeda = N,N,N',N'-tetramethylethylendiamine) and Al(acac)(3) (H-acac = acetylacetone) precursors on different substrates. The deposited layers were characterised by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM). Film structure is strongly dependent on the substrate nature and deposition conditions. AFM and XRD measurements show a good film texture and a preferential orientation along the c-axis. The Al concentration of ZnO:AI film has been confirmed by energy dispersive X-ray (EDX) analysis. Optical transparency of these ZnO layers has been studied in order to evaluate their applications as a transparent conducting oxide (TCO) material. (C) 2008 Elsevier Ltd. All rights reserved.

Characterization of ZnO and ZnO:Al films deposited by MOCVD on oriented and amorphous substrates RID F-4514-2011

FRAGALA', Maria Elena;MALANDRINO, Graziella
2009

Abstract

Zinc oxide (ZnO) and ZnO:Al-doped films were deposited by metal organic chemical vapour deposition (MOCVD) using the Zn(tta)(2)center dot tmeda (H-tta = 2-thenoyltrifluoroacetone, tmeda = N,N,N',N'-tetramethylethylendiamine) and Al(acac)(3) (H-acac = acetylacetone) precursors on different substrates. The deposited layers were characterised by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM). Film structure is strongly dependent on the substrate nature and deposition conditions. AFM and XRD measurements show a good film texture and a preferential orientation along the c-axis. The Al concentration of ZnO:AI film has been confirmed by energy dispersive X-ray (EDX) analysis. Optical transparency of these ZnO layers has been studied in order to evaluate their applications as a transparent conducting oxide (TCO) material. (C) 2008 Elsevier Ltd. All rights reserved.
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/20.500.11769/10092
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 38
  • ???jsp.display-item.citation.isi??? 39
social impact