The Cd(C5F6HO2)(2).2H(2)O complex was investigated by X-ray crystallography, mass spectroscopy, H-1 NMR spectroscopy, TG-DTG thermal measurements, and infrared transmittance spectroscopy. X-ray single-crystal data show that the cadmium ion is chelated by the oxygens of the hfa anion ligand and bound to the oxygens of two cis-disposed water molecules. Deposition experiments, in a low-pressure horizontal hot-wall reactor, on optically transparent SiO2 substrates using the above complex result in CdO films. XRD measurements provide evidence that these complexes consist of highly oriented cubic crystals. W-vis spectra show that the transmittance of as-deposited films in the visible region is about 70%. The surface structure of the CdO films was investigated by XPS. Resistivity measurements of the CdO films suggest TCO properties.