Nanostructuring thin Au films on transparent conductive oxide substrates

Fabrication processes of Au nanostructures on Indium-Tin-Oxide (ITO) surface by simple, versatile, and low-cost bottom-up methodologies are investigated in this work. A first methodology exploits the patterning effects induced by nanosecond laser irradiations on thin Au films deposited on ITO surface. We show that after the laser irradiations, the Au film break-up into nanoclusters whose mean size and surface density are tunable by the laser fluence. A second methodology exploits, instead, the patterning effects of standard furnace thermal processes on the Au film deposited on the ITO. We observe, in this case, a peculiar shape evolution from pre-formed nanoclusters during the Au deposition stage on the ITO, to holed nanostructures (i. e. nanorings), during the furnace annealing processes. The nanorings depth, height, width, and surface density are shown to be tunable by annealing temperature and time.