Proton beam writing technique was recently introduced at 3MV Tandetron accelerator at Nuclear Physics Institute in Rez (Czech Republic). It has been used, to produce three-dimensional (3D) micro-structures in poly(methylmethacrylate) by 2.0 MeV and 2.6 MeV protons micro-beam. Micro-channels (52 μm × 52 μm) have been realized. After chemical etching, the quality of the bottom and side walls of the produced structures in PMMA were analyzed using Scanning Transmission Ion Microscopy (STIM). © 2015 Elsevier B.V. All rights reserved.
|Titolo:||Micro-patterns fabrication using focused proton beam lithography|
|Data di pubblicazione:||2016|
|Appare nelle tipologie:||1.1 Articolo in rivista|