Micro-patterns fabrication using focused proton beam lithography

Cutroneo, M; Havranek, V; Mackova, A; Semian, V; Torrisi, L; Calcagno, Lucia

doi:10.1016/j.nimb.2015.10.006

Proton beam writing technique was recently introduced at 3MV Tandetron accelerator at Nuclear Physics Institute in Rez (Czech Republic). It has been used, to produce three-dimensional (3D) micro-structures in poly(methylmethacrylate) by 2.0 MeV and 2.6 MeV protons micro-beam. Micro-channels (52 μm × 52 μm) have been realized. After chemical etching, the quality of the bottom and side walls of the produced structures in PMMA were analyzed using Scanning Transmission Ion Microscopy (STIM). © 2015 Elsevier B.V. All rights reserved.

Titolo:	Micro-patterns fabrication using focused proton beam lithography
Autori interni:	Cutroneo M Havranek V Mackova A Semian V Torrisi L CALCAGNO, Lucia mostra contributor esterni nascondi contributor esterni
Data di pubblicazione:	2016
Rivista:	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Handle:	http://hdl.handle.net/20.500.11769/18792
Appare nelle tipologie:	1.1 Articolo in rivista

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http://hdl.handle.net/20.500.11769/18792

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