A one-pot reaction for the synthesis of better performing alkaline-earth precursors for metal-organic chemical vapour deposition (MOCVD) applications, is reported. The reaction of metal hydroxides (Ba(OH)2.8H2O, Sr(OH)2.8H2O) or oxide (CaO) with Hhfa and tetraglyme in air yields quantitatively monomeric, water-free, highly stable and volatile M(hfa)2.tetraglyme adducts. All the adducts have been characterized by TGA and DSC. MOCVD capabilities have been tested through depositions of metal fluoride for buffer layer applications and of BaCaCu matrices for HT(c) TlBaCaCu superconductor thin films.
A NOVEL ROUTE TO THE 2ND-GENERATION ALKALINE-EARTH METAL PRECURSORS FOR METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION - ONE-STEP SYNTHESIS OF M(HFA)2-CENTER-DOT-TETRAGLYME (M=BA, SR, CA AND HFA = 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTANEDIONE)
MALANDRINO, Graziella;CASTELLI, Francesco;
1994-01-01
Abstract
A one-pot reaction for the synthesis of better performing alkaline-earth precursors for metal-organic chemical vapour deposition (MOCVD) applications, is reported. The reaction of metal hydroxides (Ba(OH)2.8H2O, Sr(OH)2.8H2O) or oxide (CaO) with Hhfa and tetraglyme in air yields quantitatively monomeric, water-free, highly stable and volatile M(hfa)2.tetraglyme adducts. All the adducts have been characterized by TGA and DSC. MOCVD capabilities have been tested through depositions of metal fluoride for buffer layer applications and of BaCaCu matrices for HT(c) TlBaCaCu superconductor thin films.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
