Two new adducts, La(hfa)3 . diglyme (1) and La(hfa)(3) . triglyme (2), have been synthesized through the reaction of lanthanum oxide, hexafluoroacetylacetone, and polyether in benzene. They have been characterized by elemental analysis, mass spectrometry, H-1 and C-13 NMR, and an X-ray crystal structure (adduct 1). The mass transport properties and thermal behavior, investigated by running TGA and MOCVD experiments, indicate that these adducts are promising MOCVD precursors. The present synthetic strategy is of general application and opens a new route to an interesting generation of water-free lanthanide complexes.
NEW THERMALLY STABLE AND HIGHLY VOLATILE PRECURSORS FOR LANTHANUM MOCVD - SYNTHESIS AND CHARACTERIZATION OF LANTHANUM BETA-DIKETONATE GLYME COMPLEXES
MALANDRINO, Graziella;CASTELLI, Francesco;
1995-01-01
Abstract
Two new adducts, La(hfa)3 . diglyme (1) and La(hfa)(3) . triglyme (2), have been synthesized through the reaction of lanthanum oxide, hexafluoroacetylacetone, and polyether in benzene. They have been characterized by elemental analysis, mass spectrometry, H-1 and C-13 NMR, and an X-ray crystal structure (adduct 1). The mass transport properties and thermal behavior, investigated by running TGA and MOCVD experiments, indicate that these adducts are promising MOCVD precursors. The present synthetic strategy is of general application and opens a new route to an interesting generation of water-free lanthanide complexes.File in questo prodotto:
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