This paper presents an integrated sensor able to perform contactless measurements of dc electrical current. The microsensor conceived is based on the PiezoMUMPs technology which embeds a layer of piezoelectric material thus offering a mechanoelectric transduction of the measurand: the dc electrical current flowing into a wire external to the microsensor is here converted into a voltage signal without the need of auxiliary polarization signals or integrated inductors/coils as in the case electrostatic and electromagnetic devices, respectively. A prototype of the MEMS device has been designed, modeled, numerically simulated, and then fabricated. A measurement campaign allowed validating the sensor and to characterize its performances.
Characterization of a PiezoMUMPs Microsensor for Contactless Measurements of DC Electrical Current
Trigona C.;Ando B.;Baglio S.
2020-01-01
Abstract
This paper presents an integrated sensor able to perform contactless measurements of dc electrical current. The microsensor conceived is based on the PiezoMUMPs technology which embeds a layer of piezoelectric material thus offering a mechanoelectric transduction of the measurand: the dc electrical current flowing into a wire external to the microsensor is here converted into a voltage signal without the need of auxiliary polarization signals or integrated inductors/coils as in the case electrostatic and electromagnetic devices, respectively. A prototype of the MEMS device has been designed, modeled, numerically simulated, and then fabricated. A measurement campaign allowed validating the sensor and to characterize its performances.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
