Different praseodymium oxide phases have been obtained by varying oxygen partial pressure during the MOCVD process at 750 ° on Si(100). Hexagonal Pr2O3 has been obtained under oxygen deficient conditions, while at oxygen partial pressure higher than 0.7 torr oxidized phases, such as Pr6O11and/or PrO2, are dominant. Transmission electron microscopy (TEM) and energy filtered transmission electron microscopy (EFTEM) analyses have been used to characterize structural, compositional and morphological features of praseodymium oxide films.
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