Metal-organic (MO)CVD processes adopting the Sr(tmhd)(2)(.)pmdeta precursor have been investigated. In-situ Fourier-transform infrared spectroscopy (FTIR) monitoring has shown that Sr(tmhd)2.pmdeta possesses a low stability which precludes efficient sublimation/evaporation processes, and requires reactors equipped with a direct liquid injector (DLI) for suitable MOCVD processes. The deposition process results in the formation of polycrystalline SrO and/or SrCO3 films. The kinetics and the mechanism of film growth have been investigated combining in-situ FTIR techniques and ex-situ techniques for chemical and structural analyses - energy dispersive X-ray (EDX) microanalysis, X-ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD). Precursor decomposition occurs above 300 degrees C, leading to the formation of ketones and SrO films. Temperatures above 400 degrees C and partial pressures above 9 mtorr favor a further oxidation/combustion of the ligand and its by-products, thus producing greater amounts of CO2, and hence of SrCO3.

MOCVD of Sr-containing oxides: Transport properties and deposition mechanisms of the Sr(tmhd)(2)center dot pmdeta precursor

CONDORELLI, Guglielmo Guido;
2005-01-01

Abstract

Metal-organic (MO)CVD processes adopting the Sr(tmhd)(2)(.)pmdeta precursor have been investigated. In-situ Fourier-transform infrared spectroscopy (FTIR) monitoring has shown that Sr(tmhd)2.pmdeta possesses a low stability which precludes efficient sublimation/evaporation processes, and requires reactors equipped with a direct liquid injector (DLI) for suitable MOCVD processes. The deposition process results in the formation of polycrystalline SrO and/or SrCO3 films. The kinetics and the mechanism of film growth have been investigated combining in-situ FTIR techniques and ex-situ techniques for chemical and structural analyses - energy dispersive X-ray (EDX) microanalysis, X-ray photoelectron spectroscopy (XPS), and X-ray diffraction (XRD). Precursor decomposition occurs above 300 degrees C, leading to the formation of ketones and SrO films. Temperatures above 400 degrees C and partial pressures above 9 mtorr favor a further oxidation/combustion of the ligand and its by-products, thus producing greater amounts of CO2, and hence of SrCO3.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.11769/59168
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