Constrained scheduling of the inspection activities on semiconductor wafers grouped in families with sequence-dependent set-up times

The scheduling of families of semiconductor wafers within the inspection department of a company producing electronic devices is considered in this paper. Changing the family of wafers to be inspected by an inspection machine requires a sequence dependent setup time; furthermore, due to the limited space availability of the inspection area, the available interoperational buffer capacity between the inspection machines is finite. The objective of the scheduling is the maximization of inspection department productivity, measured through the sequence makespan. A permutational flowshop group scheduling problem (GSP) with sequence dependent setup times and limited interoperational buffer capacity has been taken into account. A benchmark of process scenarios considering different numbers of inspection machines wafers codes and families to be inspected has been generated. A Genetic Algorithm is here proposed as an efficient tool to solve the investigated problem. A comparison with a tabu search and a Nawaz, Enscore and Ham procedure improving the currently available scheduler tool within the inspection department has been performed on the benchmark of problems. Finally, the influence on line productivity due to the finite interoperational buffer capacity is investigated.