In this paper, an inertial transducer developed inbulk and etch silicon-on-insulator microelectromechanical-systemtechnology is presented. The device is suitable for low-frequencyobservation and could represent an interesting solution to implementlow-cost monitoring systems for applications requiringa large number of monitoring sites and disposable devices. Inparticular, the sensor design and the technology adopted arepresented here along with models describing the device operation.In addition, an experimental sensor prototype is proposed, andexperimental results confirming the suitability of the proposedarchitecture and its consistence with the predicted behavior arediscussed.
A BE-SOI MEMS for Inertial Measurement in Geophysical Applications
ANDO', Bruno;BAGLIO, Salvatore;L'Episcopo G;Marletta V;Savalli N;TRIGONA, CARLO
2011-01-01
Abstract
In this paper, an inertial transducer developed inbulk and etch silicon-on-insulator microelectromechanical-systemtechnology is presented. The device is suitable for low-frequencyobservation and could represent an interesting solution to implementlow-cost monitoring systems for applications requiringa large number of monitoring sites and disposable devices. Inparticular, the sensor design and the technology adopted arepresented here along with models describing the device operation.In addition, an experimental sensor prototype is proposed, andexperimental results confirming the suitability of the proposedarchitecture and its consistence with the predicted behavior arediscussed.| File | Dimensione | Formato | |
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BE-SOI_2001_23.pdf
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