CINECA IRIS Institutional Research Information System
IRIS è la soluzione IT che facilita la raccolta e la gestione dei dati relativi alle attività e ai prodotti della ricerca. Fornisce a ricercatori, amministratori e valutatori gli strumenti per monitorare i risultati della ricerca, aumentarne la visibilità e allocare in modo efficace le risorse disponibili.
EnglishIn this paper, an inertial transducer developed inbulk and etch silicon-on-insulator microelectromechanical-systemtechnology is presented. The device is suitable for low-frequencyobservation and could represent an interesting solution to implementlow-cost monitoring systems for applications requiringa large number of monitoring sites and disposable devices. Inparticular, the sensor design and the technology adopted arepresented here along with models describing the device operation.In addition, an experimental sensor prototype is proposed, andexperimental results confirming the suitability of the proposedarchitecture and its consistence with the predicted behavior arediscussed.
| Titolo: | A BE-SOI MEMS for Inertial Measurement in Geophysical Applications | |
| Autori interni: | ||
| Data di pubblicazione: | 2011 | |
| Rivista: | ||
| Handle: | http://hdl.handle.net/20.500.11769/8540 | |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
File in questo prodotto:
http://hdl.handle.net/20.500.11769/8540
Copyright © 2021