High Resolution X-Ray Diffraction (HRXRD) was used to study the strain evolution of lattice defects formed in an array of B delta layers grown by Molecular Beam Epitaxy (MBE) and damaged by sub-amorphizing Ge self-implantation The MBE structure was implanted at room temperature (RT) with 840 keV Ge at a dose of 15 x 10(12) Ge/cm(2) First of all, we observed a RT strain reduction of similar to 40% with respect to the strain value found in the just-implanted sample This strain ageing phenomenon saturates in about 5 months Then, the complete defects dissolution was monitored by in-situ HRXRD during isochronal annealings. Three others strain-recovery steps were identified. the last at T=157 degrees C Moreover, Secondary Ion Mass Spectrometry performed after the strain recovery did not detect any B diffusion till T was raised up to 840 degrees C, measuring in this case a B diffusion equal to the equilibrium one. The whole set of data will be discussed and compared with existing literature (C) 2009 Elsevier B.V. All rights reserved.

Defects in Ge caused by sub-amorphizing self-implantation: Formation and dissolution

BRUNO, ELENA;TERRASI, Antonio
2010

Abstract

High Resolution X-Ray Diffraction (HRXRD) was used to study the strain evolution of lattice defects formed in an array of B delta layers grown by Molecular Beam Epitaxy (MBE) and damaged by sub-amorphizing Ge self-implantation The MBE structure was implanted at room temperature (RT) with 840 keV Ge at a dose of 15 x 10(12) Ge/cm(2) First of all, we observed a RT strain reduction of similar to 40% with respect to the strain value found in the just-implanted sample This strain ageing phenomenon saturates in about 5 months Then, the complete defects dissolution was monitored by in-situ HRXRD during isochronal annealings. Three others strain-recovery steps were identified. the last at T=157 degrees C Moreover, Secondary Ion Mass Spectrometry performed after the strain recovery did not detect any B diffusion till T was raised up to 840 degrees C, measuring in this case a B diffusion equal to the equilibrium one. The whole set of data will be discussed and compared with existing literature (C) 2009 Elsevier B.V. All rights reserved.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/20.500.11769/51057
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