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Titolo Data di pubblicazione Autore(i) File
ION-INDUCED ANNEALING AND AMORPHIZATION OF ISOLATED DAMAGE CLUSTERS IN SI 1-gen-1990 Battaglia, A; Priolo, Francesco; Rimini, E; Ferla, G. file da validare
CONCENTRATION-DEPENDENCE AND INTERFACIAL INSTABILITIES DURING ION-BEAM ANNEALING OF ARSENIC-DOPED SILICON 1-gen-1990 Priolo, Francesco; Rimini, E; Spinella, C; Ferla, G. file da validare
PHENOMENOLOGICAL DESCRIPTION OF ION-BEAM-INDUCED EPITAXIAL CRYSTALLIZATION OF AMORPHOUS-SILICON 1-gen-1990 Priolo, Francesco; Spinella, C; Rimini, E. file da validare
HIGH-ENERGY CHANNELING IMPLANTS OF PHOSPHORUS ALONG THE SILICON[100] AND SILICON[110] AXES 1-gen-1991 Raineri, V; Setola, R; Priolo, Francesco; Rimini, E; Galvagno, G. file da validare
INFLUENCE OF DOPING ON ION-INDUCED GROWTH AND SHRINKAGE OF PARTIAL DAMAGE IN SILICON 1-gen-1991 Battaglia, A; Priolo, Francesco; Rimini, E. file da validare
EPITAXIAL REALIGNMENT OF POLYCRYSTALLINE SI LAYERS BY RAPID THERMAL ANNEALING 1-gen-1991 Benyaich, F; Priolo, Francesco; Rimini, E; Spinella, C; Ward, P; Baroetto, F. file da validare
REALIGNMENT OF ARSENIC DOPED POLYCRYSTALLINE SI FILMS BY DOUBLE STEP ANNEALING 1-gen-1991 Benyaich, F; Priolo, Francesco; Rimini, E; Spinella, C; Ward, P. file da validare
CONCENTRATION PROFILES AND ELECTRICAL CHARACTERIZATION OF HIGH-ENERGY PHOSPHORUS IMPLANTS IN (100) SILICON 1-gen-1991 Galvagno, G; Cacciato, A; Benyaich, F; Raineri, V; Priolo, Francesco; Rimini, E; Capizzi, S; Romano, P. file da validare
REALIGNMENT OF AS DOPED SILICON FILMS DEPOSITED ON (100) SILICON SUBSTRATES 1-gen-1991 Benyaich, F; Priolo, Francesco; Rimini, E; Spinella, C; Baroetto, F; Cannavo, S; Ward, P. file da validare
EVOLUTION OF LOW-FLUENCE HEAVY-ION DAMAGE IN SI UNDER HIGH-ENERGY ION IRRADIATION 1-gen-1991 Battaglia, A; Priolo, Francesco; Spinella, C; Rimini, E. file da validare
ION-ASSISTED NUCLEATION IN AMORPHOUS-SILICON - ION MASS AND DOSE-RATE EFFECTS 1-gen-1991 Spinella, C; Battaglia, A; Priolo, Francesco; Campisano, Su file da validare
ION-ASSISTED CRYSTALLIZATION IN SILICON - EPITAXY AND GRAIN-GROWTH 1-gen-1991 Spinella, C; Priolo, Francesco; Lombardo, S; Campisano, Su; Rimini, E. file da validare
AMORPHOUS CRYSTAL SILICON INTERFACES - STRUCTURE AND MOVEMENT UNDER ION-BEAM IRRADIATION 1-gen-1992 Battaglia, A; Priolo, Francesco; Rimini, E. file da validare
GROWTH-SITE-LIMITED CRYSTALLIZATION OF AMORPHOUS-SILICON 1-gen-1992 Custer, Js; Battaglia, A; Saggio, M; Priolo, Francesco file da validare
KINETIC AND STRUCTURAL STUDY OF THE EPITAXIAL REALIGNMENT OF POLYCRYSTALLINE SI FILMS 1-gen-1992 Benyaich, F; Priolo, Francesco; Rimini, E; Spinella, C. file da validare
MEV P IMPLANTS IN SILICON - EXPERIMENTS AND SIMULATION 1-gen-1992 Galvagno, G; Raineri, V; Setola, R; Priolo, Francesco; Rimini, E. file da validare
CRYSTALLIZATION KINETICS OF BORON-IMPLANTED AND GERMANIUM-IMPLANTED (100) SI - A BALANCE BETWEEN DOPING AND STRAIN EFFECTS 1-gen-1992 Corni, F; Tonini, R; Ottaviani, G; Servidori, M; Priolo, Francesco file da validare
MECHANISMS OF ION-BEAM-ENHANCED DIFFUSION IN AMORPHOUS-SILICON 1-gen-1992 Coffa, S; Jacobson, Dc; Poate, Jm; Priolo, Francesco file da validare
HIGH-ENERGY P-IMPLANTS IN SILICON 1-gen-1992 Raineri, V; Cacciato, A; Benyaich, F; Priolo, Francesco; Rimini, E; Galvagno, G; Capizzi, S. file da validare
STRUCTURAL CHARACTERIZATION OF THE EPITAXIAL REALIGNMENT OF POLYCRYSTALLINE SILICON FILMS 1-gen-1992 Benyaich, F; Priolo, Francesco; Rimini, E; Spinella, C; Ward, P. file da validare
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